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TECHNOLOGICAL ROUTES FOR MANUFACTURED MICROWAVE PLANAR METAL –CERAMIC MICROPACKAGES


CORNEL ANTON
National Institutes for R& D in Microtechnologies, Bucharest, Romania

Issue:

PLUMEE, Number 1, Volume IV

Section:

Issue No.1 - Volume 4 (2014)

Abstract:

The paper comparatively presents planar micropackages for mounting microwave devices manufactured by two technological routes(the classical technology and the gold-gold diffusion method) , using technological processes specific to electronic microtechnologies. By using technological processes specific to electronic micro technologies (metallic thin film deposition, masking, photolithography photoresist mask etching) ceramic structures with a certain metallization configuration and an exceptional dimensional precision, dimensional tolerance being of the order of microns, are obtained. [1]

Keywords:

micropackage, metal-ceramic, microwave, ceramic-structures, gold-gold diffusion.

Code [ID]:

PLUMEE201401V04S01A0001 [0004071]

Full paper:

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