Uniform, adherent and reproducible antimony trisulfide (Sb2S3) thin films have been deposited on glass substrates maintained at room temperature, using thermal evaporation technique under vacuum. The effect of annealing on the physical on the crystal structure, surface morphology and optical properties of Sb2S3 thin films has been studied. The structural analysis from transmission electron microscopy showed that the as-deposited films were amorphous in structure and annealed films at 500 K become polycrystalline with orthorhombic structure. The effect of the annealing temperature on the dispersion of refractive index of the as-deposited films was investigated and analyzed within the single oscillator model.
