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HYDROGENATED AMORPHOUS CARBON (a-C:H) THIN FILMS DOPED WITH FLUORINE ATOMS: CORRELATION BETWEEN COMPOSITION AND MECHANICAL PROPERTIES


J. P. LAVOUTE 1 2, L. KILMAN 1 2, C. JAOUL 1, P. TRISTANT 1, C. DUBLANCHE-TIXIER 1, M. COLAS 1, E. LABORDE 1, F. MEUNIER 2, O. JARRY 3
1. Sciences des Procédés Céramiques et de Traitements de Surface, Université de Limoges ENSIL, 16 rue Atlantis, 87068 Limoges
2. Sulzer Sorevi, Parc Ester Technopole, 5 allée Skylab, 87068 Limoges
3. Sulzer Metaplas GmbH, Am Böttcherberg 30-38, 51427 Bergisch Gladbach,

Issue:

PLUMEE, Number 1, Volume I

Section:

Issue No. 1 - Volume 3(2013)
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Abstract:

The objective of this study is to increase the wear resistance of hydrogenated amorphous carbon (a-C:H) thin films obtained by PECVD in an industrial reactor. A way of improvement is to incorporate dopants such as fluorine to reduce the coefficient of friction. The physico-chemical properties of various coatings doped with fluorine atoms are studied and special attention was paid to their mechanical properties and their structures.

Keywords:

thin films, DLC, fluorine doping.

Code [ID]:

PLUMEE201301V01S01A0027 [0003983]

Full paper:

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