This paper presents two specific methods to determine the high frequency dielectric properties of deposited thin films on substrates. One uses two dielectric resonators facing each other inside a cylindrical cavity and the other method is based on the use of Klystron cavities. While introducing one sample at the time into the resonant cavity, we measured shifts from the two-mode resonance frequencies and their associated unloaded quality factors. These latter allow retrieving the permittivity and loss tangent of the sample under test by using rigorous electromagnetic simulation software.
