Vicinal surfaces used as templates are an interesting way to organize systems at a nanometric scale. In this study, the surface morphology was characterized with grazing incidence small angle x-rays scattering method (GISAXS). We showed that a diffract meter with a goniometric sample holder associated with a scattering bench allows to measure precisely the evolution of the scattering signal as a function of the azimuth angle and thus to follow the surface ordering.