HYDROGENATED AMORPHOUS CARBON (a-C:H) THIN FILMS DOPED WITH FLUORINE ATOMS: CORRELATION BETWEEN COMPOSITION AND MECHANICAL PROPERTIES
J. P. LAVOUTE(1 2), L. KILMAN(1 2), C. JAOUL(1), P. TRISTANT(1), C. DUBLANCHE-TIXIER(1), M. COLAS(1), E. LABORDE(1), F. MEUNIER(2), O. JARRY(3)
1. Sciences des Procédés Céramiques et de Traitements de Surface, Université de Limoges ENSIL, 16 rue Atlantis, 87068 Limoges 2. Sulzer Sorevi, Parc Ester Technopole, 5 allée Skylab, 87068 Limoges 3. Sulzer Metaplas GmbH, Am Böttcherberg 30-38, 51427 Bergisch Gladbach,
Abstract
The objective of this study is to increase the wear resistance of hydrogenated amorphous carbon (a-C:H) thin films obtained by PECVD in an industrial reactor. A way of improvement is to incorporate dopants such as fluorine to reduce the coefficient of friction. The physico-chemical properties of various coatings doped with fluorine atoms are studied and special attention was paid to their mechanical properties and their structures.