ELABORATION OF LEAD-FREE PIEZOELECTRIC MATERIALS FOR THICK FILMS COATING BY AEROSOL DEPOSITION

NOMEL INNOCENT1, 2, MARCHET PASCAL 2*, BERTHOIX FABIEN1, DURANDPANTEIX OLIVER 1, BOYER LAURENCE1

1 CTTC, 7 rue Soyouz 87068 Limoges Cedex France
2 Univ. de Limoges, IRCER, CEC, 12 rue Atlantis 87068 Limoges Cedex France
*pascal.marchet@unilim.fr

Abstract

Thick and dense ceramics films coatings of lead-free 0.94 Na0.5Bi0.5TiO3–0.06 BaTiO3 (NBT-6BT) composition have been realized by aerosol deposition method (ADM) on glass substrates. The initial used powder was elaborated by solid-state reaction. A dedicated synthesis protocol has allowed elaborating a micron powder adapted to this type of deposit. Obtaining the right crystallographic structure on films of about 2 μm thickness and low roughness opens the way to the optimization of the process.

Keywords

Thick films aerosol deposition Aerosol Deposition Method (ADM) INPACT process piezoelectric material lead-free perovskite.