ELABORATION OF LEAD-FREE PIEZOELECTRIC MATERIALS FOR THICK FILMS COATING BY AEROSOL DEPOSITION
NOMEL INNOCENT1, 2, MARCHET PASCAL 2*, BERTHOIX FABIEN1, DURANDPANTEIX OLIVER 1, BOYER LAURENCE1
1 CTTC, 7 rue Soyouz 87068 Limoges Cedex France 2 Univ. de Limoges, IRCER, CEC, 12 rue Atlantis 87068 Limoges Cedex France *pascal.marchet@unilim.fr
Abstract
Thick and dense ceramics films coatings of lead-free 0.94 Na0.5Bi0.5TiO3–0.06
BaTiO3 (NBT-6BT) composition have been realized by aerosol deposition method (ADM)
on glass substrates. The initial used powder was elaborated by solid-state reaction. A
dedicated synthesis protocol has allowed elaborating a micron powder adapted to this type
of deposit. Obtaining the right crystallographic structure on films of about 2 μm thickness
and low roughness opens the way to the optimization of the process.