ELABORATION OF LEAD-FREE PIEZOELECTRIC MATERIALS FOR THICK FILMS COATING BY AEROSOL DEPOSITION

  • NOMEL INNOCENT
    CTTC, 7 rue Soyouz 87068 Limoges Cedex France
  • MARCHET PASCAL
    Univ. de Limoges, IRCER, CEC, 12 rue Atlantis 87068 Limoges Cedex France 2
  • BERTHOIX FABIEN
    Univ. de Limoges, IRCER, CEC, 12 rue Atlantis 87068 Limoges Cedex France 2
  • DURANDPANTEIX OLIVER
    CTTC, 7 rue Soyouz 87068 Limoges Cedex France
  • BOYER LAURENCE
    CTTC, 7 rue Soyouz 87068 Limoges Cedex France

Abstract

Thick and dense ceramics films coatings of lead-free 0.94 Na0.5Bi0.5TiO3–0.06
BaTiO3 (NBT-6BT) composition have been realized by aerosol deposition method (ADM)
on glass substrates. The initial used powder was elaborated by solid-state reaction. A
dedicated synthesis protocol has allowed elaborating a micron powder adapted to this type
of deposit. Obtaining the right crystallographic structure on films of about 2 μm thickness
and low roughness opens the way to the optimization of the process.

Cuvinte cheie

Thick films aerosol deposition Aerosol Deposition Method (ADM) INPACT process piezoelectric material lead-free perovskite.