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ELABORATION OF LEAD-FREE PIEZOELECTRIC MATERIALS FOR THICK FILMS COATING BY AEROSOL DEPOSITION


NOMEL INNOCENT1, 2, MARCHET PASCAL 2*, BERTHOIX FABIEN1, DURANDPANTEIX OLIVER 1, BOYER LAURENCE1
1 CTTC, 7 rue Soyouz 87068 Limoges Cedex France
2 Univ. de Limoges, IRCER, CEC, 12 rue Atlantis 87068 Limoges Cedex France
*pascal.marchet@unilim.fr

Issue:

PLUMEE, Number 1, Volume IX

Section:

Issue No.1 - Volume 9 (2019)

Abstract:

Thick and dense ceramics films coatings of lead-free 0.94 Na0.5Bi0.5TiO3–0.06

BaTiO3 (NBT-6BT) composition have been realized by aerosol deposition method (ADM)

on glass substrates. The initial used powder was elaborated by solid-state reaction. A

dedicated synthesis protocol has allowed elaborating a micron powder adapted to this type

of deposit. Obtaining the right crystallographic structure on films of about 2 ÎŒm thickness

and low roughness opens the way to the optimization of the process.

Keywords:

Thick films, aerosol deposition, Aerosol Deposition Method (ADM), INPACT process, piezoelectric material, lead-free perovskite.

Code [ID]:

PLUMEE201901V09S01A0027 [0004995]

Note:

DOI:

Full paper:

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